Preparation of AlN, AlN-TiN thin films by RF magnetron sputtering.
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Powder and Powder Metallurgy
سال: 1991
ISSN: 0532-8799,1880-9014
DOI: 10.2497/jjspm.38.339